Bulletin of the American Physical Society
65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012; Austin, Texas
Session SR1: Plasma Modeling and Simulations III
3:30 PM–5:00 PM,
Thursday, October 25, 2012
Room: Amphitheatre 204
Chair: Ikuo Sawada, Tokyo Electron Limited
Abstract ID: BAPS.2012.GEC.SR1.2
Abstract: SR1.00002 : Thermal mechanism of prepeak formation in Pulsed Glow Discharge
4:00 PM–4:15 PM
Preview Abstract Abstract
Authors:
Maxim Voronov
(Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany)
Volker Hoffmann
(Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany)
Tobias Steingrobe
(University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany)
Wolfgang Buscher
(University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany)
Carsten Engelhard
(University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany)
Andrew Storey
(Indiana University, Department of Chemistry, USA)
Steven Ray
(Indiana University, Department of Chemistry, USA)
Gary Hieftje
(Indiana University, Department of Chemistry, USA)
Collaboration:
NIMESA
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2012.GEC.SR1.2
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