65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session SR1: Plasma Modeling and Simulations III
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Show Abstracts |
Chair: Ikuo Sawada, Tokyo Electron Limited
Room: Amphitheatre 204
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Thursday, October 25, 2012
3:30PM - 4:00PM
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SR1.00001: Kinetic and electromagnetic effects in technical plasmas
Invited Speaker:
Denis Eremin
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Thursday, October 25, 2012
4:00PM - 4:15PM
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SR1.00002: Thermal mechanism of prepeak formation in Pulsed Glow Discharge
Maxim Voronov, Volker Hoffmann, Tobias Steingrobe, Wolfgang Buscher, Carsten Engelhard, Andrew Storey, Steven Ray, Gary Hieftje
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Thursday, October 25, 2012
4:15PM - 4:30PM
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SR1.00003: 3D Hydrodynamic Simulations of Atmospherc-Pressure Inductively-Coupled Plasma Torches and Microwave Plasma Torches
Peter Williams
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Thursday, October 25, 2012
4:30PM - 4:45PM
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SR1.00004: Simulations of pulsed rf plasma sources using CFD-ACE+
Mustafa Megahed, Ananth Bhoj, Sing Ki Nam, Raj Dhindsa
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Thursday, October 25, 2012
4:45PM - 5:00PM
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SR1.00005: Links between vortex formation and ambipolar flow in 2D ICP fluid simulations
David Urrabazo, Matthew Goeckner
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