Bulletin of the American Physical Society
64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session TF2: Plasma Modeling and Simulation
9:30 AM–11:45 AM,
Friday, November 18, 2011
Room: 255E
Chair: Uwe Czarnetzki, Ruhr University
Abstract ID: BAPS.2011.GEC.TF2.7
Abstract: TF2.00007 : SiH4-H2-Plasma Modeling of the deposition of $\mu $c-Si:H Solar Cells
11:00 AM–11:15 AM
Preview Abstract
Abstract
Authors:
Stephan Danko
(Robert Bosch GmbH)
Wladislaw Dobrygin
(RUB)
Oliver Schmidt
(Robert Bosch GmbH)
Ralf Peter Brinkmann
(RUB)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.GEC.TF2.7
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