Friday, November 18, 2011
9:30AM - 9:45AM
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TF2.00001: Finite Penetration Depth Model for 2D and 3D Simulation of Etching, Deposition, and Implantation
Paul Moroz
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Friday, November 18, 2011
9:45AM - 10:00AM
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TF2.00002: ABSTRACT WITHDRAWN
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Friday, November 18, 2011
10:00AM - 10:15AM
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TF2.00003: Particle-in-cell/Monte Carlo simulation of capacitively coupled chlorine plasmas
Kenji Matsuoka, Yoshinori Takao, Koji Eriguchi, Kouichi Ono
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Friday, November 18, 2011
10:15AM - 10:30AM
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TF2.00004: Global Model of Atmospheric Pressure Plasmas with Capacitively-Coupled Radio-Frequency Excitation
Kari Niemi, Jochen Waskoenig, Deborah O'Connell, Timo Gans
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Friday, November 18, 2011
10:30AM - 10:45AM
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TF2.00005: Manipulating electron dynamics and plasma chemistry in dual radio-frequency driven atmospheric pressure plasmas
Colm O'Neill, Kari Niemi, Jochen Waskoenig, Timo Gans
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Friday, November 18, 2011
10:45AM - 11:00AM
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TF2.00006: Modeling of Interactions between Surface properties, DC Self Bias and Plasma Stability in PECVD Tools
Federico Galli, Douglas Keil, Edward Augustyniak
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Friday, November 18, 2011
11:00AM - 11:15AM
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TF2.00007: SiH4-H2-Plasma Modeling of the deposition of $\mu $c-Si:H Solar Cells
Stephan Danko, Wladislaw Dobrygin, Oliver Schmidt, Ralf Peter Brinkmann
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Friday, November 18, 2011
11:15AM - 11:30AM
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TF2.00008: Modeling of an Atmospheric Pressure Helium Plasma Jet
Douglas Breden, Kenji Miki, Laxminarayan Raja
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Friday, November 18, 2011
11:30AM - 11:45AM
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TF2.00009: Symmetric multi-component diffusion modeling for Magnum PSI
Kim Peerenboom, Jan van Dijk, Wim Goedheer, Joost van der Mullen
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