Bulletin of the American Physical Society
64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session AM1: Workshop: Control of Distribution Functions in Low Temperature Plasmas
7:45 AM–5:34 PM,
Monday, November 14, 2011
Room: 255A
Chair: Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland
Abstract ID: BAPS.2011.GEC.AM1.12
Abstract: AM1.00012 : Lunch Break and Industry Speakers
12:30 PM–2:00 PM
Preview Abstract
Abstract 
Authors:
Peter Ventzek
(Tokyo Electron America)
Robert J. Baker
(AFOSR, retired)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.GEC.AM1.12
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