Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session AM1: Workshop: Control of Distribution Functions in Low Temperature Plasmas	Show Abstracts
Chair: Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland Room: 255A

Monday, November 14, 2011 7:45AM - 8:00AM		AM1.00001: INTRODUCTION Igor Kaganovich Preview Abstract
Monday, November 14, 2011 8:00AM - 8:30AM		AM1.00002: Electron Temperature Modification in Gas Discharge Plasmas Valery Godyak Preview Abstract
Monday, November 14, 2011 8:30AM - 9:00AM		AM1.00003: Plasma-surface interactions in the control of plasma distribution functions: $\alpha $-C:H surfaces impacted by Ar/H2 plasmas David Graves, Ning Ning, Nick Fox-Lyon, Gottlieb Oehrlein Preview Abstract
Monday, November 14, 2011 9:00AM - 9:30AM		AM1.00004: BREAK Preview Abstract
Monday, November 14, 2011 9:30AM - 9:55AM		AM1.00005: Ion energy distribution functions of ions hitting nanoparticles in plasmas Uwe Kortshagen, Federico Galli, Meenakshi Mamunuru Preview Abstract
Monday, November 14, 2011 9:55AM - 10:20AM		AM1.00006: Electron energy distribution functions modified by MacKenzie Maxwell Demons Noah Hershkowitz, Chi-Shung Yip Preview Abstract
Monday, November 14, 2011 10:20AM - 10:45AM		AM1.00007: Multiple electron distributions in multidipolar plasma devices Scott Robertson, Scott Knappmiller Preview Abstract
Monday, November 14, 2011 10:45AM - 11:10AM		AM1.00008: Volumetric Control of Anisotropic Electron Distribution Functions in Plasmas with Langmuir Oscillations A.S. Mustafaev, I.D. Kaganovich, V.I. Demidov, S.F. Adams Preview Abstract
Monday, November 14, 2011 11:10AM - 11:40AM		AM1.00009: The Langmuir Paradox: can the ion acoustic instability at the sheath edge thermalize the ions too? Chi-Shung Yip, Noah Hershkowitz, Greg Severn Preview Abstract
Monday, November 14, 2011 11:40AM - 12:05PM		AM1.00010: DISCUSSION: Diagnostics Methods for Measurements of Plasma Distribution Functions Preview Abstract
Monday, November 14, 2011 12:05PM - 12:30PM		AM1.00011: Physical Mechanisms of the Electron Energy Distribution Function Control in Inhomogeneous Non-stationary Plasma Anatoly Kudryavtsev, Lev Tsendin Preview Abstract
Monday, November 14, 2011 12:30PM - 2:00PM		AM1.00012: Lunch Break and Industry Speakers Peter Ventzek, Robert J. Baker Preview Abstract
Monday, November 14, 2011 2:00PM - 2:15PM		AM1.00013: Experiments, simulations and modelling of the electron energy distribution functions in low pressure rf excited non-local plasmas Rod Boswell, Christine Charles, Kazunori Takahashi Preview Abstract
Monday, November 14, 2011 2:15PM - 2:30PM		AM1.00014: Control of electron energy distribution function by high frequency fields and by the effect of crossed magnetic field Zoran Petrovic, Sasa Dujko, Ronald White Preview Abstract
Monday, November 14, 2011 2:30PM - 2:55PM		AM1.00015: Nonlocal Control of Electron Energy Distribution Functions in Plasmas with Active Boundaries V.I. Demidov, I.D. Kaganovich, A.S. Mustafaev, M.E. Koepke, Y. Raitses, S.F. Adams, I. Schweigert Preview Abstract
Monday, November 14, 2011 2:55PM - 3:20PM		AM1.00016: Control of Ion and Electron Distribution Functions by the Electrical Asymmetry Effect Uwe Czarnetzki Preview Abstract
Monday, November 14, 2011 3:20PM - 3:50PM		AM1.00017: DISCUSSION: Numerical Methods for Measurements of Plasma Distribution Functions Preview Abstract
Monday, November 14, 2011 3:50PM - 4:05PM		AM1.00018: Plasma-Surface Interactions and Impact on Electron Energy Distribution Function N.A. Fox-Lyon, G.S. Oehrlein, N. Ning, D.B. Graves, V. Godyak Preview Abstract
Monday, November 14, 2011 4:05PM - 4:30PM		AM1.00019: Is particle distribution control necessary in plasma etching processes? M.M. Turner, B.J. Keville, S. Daniels, Y. Zhang, A.M. Holohan Preview Abstract
Monday, November 14, 2011 4:30PM - 4:55PM		AM1.00020: Fast Analytical-Numerical Model of Atmospheric Pressure Radio-Frequency Capacitive Discharges M.A. Lieberman, A.J. Lichtenberg, C. Lazzaroni, P. Chabert, A. Leblanc, Jing Zhang Preview Abstract
Monday, November 14, 2011 4:55PM - 5:02PM		AM1.00021: Kr ion Laser-Induced Fluorescence using a tunable diode laser near 729nm Greg Severn Preview Abstract
Monday, November 14, 2011 5:02PM - 5:09PM		AM1.00022: Simulating Electron Scattering in Cold-Cathode Discharges Alexander V. Khrabrov Preview Abstract
Monday, November 14, 2011 5:09PM - 5:34PM		AM1.00023: Measurement of the perturbed distributions of electrons and ions Fred Skiff Preview Abstract

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Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session AM1: Workshop: Control of Distribution Functions in Low Temperature Plasmas

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