62nd Annual Gaseous Electronics Conference
Volume 54, Number 12
Tuesday–Friday, October 20–23, 2009;
Saratoga Springs, New York
Session Index
Session GT1: Plasma Aided Implantation
Chair: Svetlana Radovanov, Varian Semiconductor
Room: Saratoga Hilton Ballroom 1
Tuesday, October 20, 2009
10:00AM - 10:30AM
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GT1.00001: Sheath dynamics and energetic particle distributions on substrates
Invited Speaker:
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Tuesday, October 20, 2009
10:30AM - 11:00AM
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GT1.00002: Multi-frequency, finite-wavelength and dc-augmentation effects in large area capacitive sources
Invited Speaker:
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Tuesday, October 20, 2009
11:00AM - 11:15AM
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GT1.00003: Self-Regulation Plasma Doping for 2D and 3D devices
Bunji Mizuno
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Tuesday, October 20, 2009
11:15AM - 11:30AM
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GT1.00004: Advanced Dopant Profile Control for Plasma Doping Processes
Ludovic Godet, Shu Qin, Ziwei Fang, G.D. Papasouliotis, Timothy Miller, Vikram Singh, Svetlana Radovanov
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Tuesday, October 20, 2009
11:30AM - 11:45AM
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GT1.00005: One-Step, Non-Contact Pattern Transfer by Direct-Current Plasma Immersion Ion Implantation
Dixon T.K. Kwok, Paul K. Chu
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Tuesday, October 20, 2009
11:45AM - 12:00PM
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GT1.00006: Transport Coefficients for Electrons in BF3
Zoran Lj. Petrovic, Zeljka Nikitovic, Olivera Sasic, Zoran Raspopovic, Vladimir Stojanovic, Svetlana Radovanov
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Session GT2: Actuators and Flow Control
Chair: David Smith, General Electric
Room: Saratoga Hilton Ballroom 2
Tuesday, October 20, 2009
10:00AM - 10:15AM
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GT2.00001: Thrust Enhancing Designs for single DBD Plasma Actuators
Song Guo, Uwe Kortshagen
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Tuesday, October 20, 2009
10:15AM - 10:30AM
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GT2.00002: Experimental investigations of a simple DBD-based flow actuator
Yacine Babou, Anna-Elodie Kerlo, Sebastien Paris
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Tuesday, October 20, 2009
10:30AM - 10:45AM
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GT2.00003: Separation control using plasma actuator: Simulation of plasma actuator
Meenakshi Mamunuru, Douglas Ernie, Terry Simon, Uwe Kortshagen
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Tuesday, October 20, 2009
10:45AM - 11:00AM
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GT2.00004: Simulations of Thermal Phenomena in Nanosecond Pulsed Plasma Discharged in Supersonic Flows
Doug Breden, Laxminarayan Raja
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Tuesday, October 20, 2009
11:00AM - 11:15AM
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GT2.00005: ABSTRACT WITHDRAWN
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Tuesday, October 20, 2009
11:15AM - 11:30AM
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GT2.00006: ABSTRACT WITHDRAWN
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Tuesday, October 20, 2009
11:30AM - 11:45AM
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GT2.00007: Numerical and Experimental Investigations of Plasma Actuators Based on Magnetogasdynamics
Chiranjeev Kalra, Sohail Zaidi, Mikhail Shneider, Richard Miles
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Session GT3: Low Pressure Plasma Diagnostics
Chair: John Boffard, University of Wisconsin
Room: Saratoga Hilton Ballroom 3
Tuesday, October 20, 2009
10:00AM - 10:30AM
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GT3.00001: Plasma diagnostics using floating harmonics method and recent results in processing plasmas
Invited Speaker:
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Tuesday, October 20, 2009
10:30AM - 10:45AM
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GT3.00002: Evaluation of Advanced Algorithms to improve EEDF extraction from Langmuir Probe data Using Tikhonov Regularization Methods
A. El Saghir, C. Kennedy, S. Shannon, B. Pathak, J. Alexander, K. Nordheden
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Tuesday, October 20, 2009
10:45AM - 11:00AM
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GT3.00003: Impedance Characteristics of the Plasma Absorption Probe
Yohei Yamazawa
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Tuesday, October 20, 2009
11:00AM - 11:15AM
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GT3.00004: Diagnostics of RF magnetron sputtering plasma for synthesizing transparent conductive Indium-Zinc-Oxide film
Takayuki Ohta, Mari Inoue, Naoki Takota, Masafumi Ito, Yasuhiro Higashijima, Hiroyuki Kano, Shoji Den, Koji Yamakawa, Masaru Hori
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Tuesday, October 20, 2009
11:15AM - 11:30AM
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GT3.00005: Origin of electrical changes occurring at plasma etching endpoint
Mark Sobolewski, David Lahr
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Tuesday, October 20, 2009
11:30AM - 11:45AM
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GT3.00006: Behavior of hydrogen atoms in plasma enhanced chemical vapor deposition of microcrystalline silicon film
Yusuke Abe, Sho Kawashima, Keigo Takeda, Makoto Sekin, Masaru Hori
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Tuesday, October 20, 2009
11:45AM - 12:00PM
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GT3.00007: Tomographic diagnostics of nonthermal plasmas
Natalia Denisova
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