Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session PR2: Capacitively Coupled Plasmas I
1:30 PM–3:00 PM,
Thursday, October 3, 2013
Room: Ballroom II
Chair: Kallol Bera, Applied Materials Inc.
Abstract ID: BAPS.2013.GEC.PR2.3
Abstract: PR2.00003 : A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge
2:00 PM–2:15 PM
Preview Abstract Abstract
Authors:
Jon T. Gudmundsson
(University of Iceland)
Shuo Huang
(University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.PR2.3
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