Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session PR2: Capacitively Coupled Plasmas I
1:30 PM–3:00 PM,
Thursday, October 3, 2013
Room: Ballroom II
Chair: Kallol Bera, Applied Materials Inc.
Abstract ID: BAPS.2013.GEC.PR2.2
Abstract: PR2.00002 : Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model*
1:45 PM–2:00 PM
Preview Abstract Abstract
Authors:
Schabnam Naggary
(Ruhr University Bochum)
Mohammed Shihab
(Ruhr University Bochum)
Frank Atteln
(Ruhr University Bochum)
Mustafa Megahed
(ESI Group)
Ralf Peter Brinkmann
(Ruhr University Bochum)
*The authors acknowledge support by the ESI Group, DFG via SFB-TR87, and the Ruhr-University Research School.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.PR2.2
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