Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session PR2: Capacitively Coupled Plasmas I
1:30 PM–3:00 PM,
Thursday, October 3, 2013
Room: Ballroom II
Chair: Kallol Bera, Applied Materials Inc.
Abstract ID: BAPS.2013.GEC.PR2.4
Abstract: PR2.00004 : Numerical Confirmation of the Feasibility to Generate Uniform Large-Area VHF Plasmas by Launching a Travelling Wave
2:15 PM–2:30 PM
Preview Abstract Abstract
Authors:
Hsin-Liang Chen
(Physics Division, Institute of Nuclear Energy Research (INER))
Yen-Cheng Tu
(Physics Division, Institute of Nuclear Energy Research (INER))
Cheng-Chang Hsieh
(Physics Division, Institute of Nuclear Energy Research (INER))
Wen-Fa Tsai
(Physics Division, Institute of Nuclear Energy Research (INER))
Chi-Fong Ai
(Physics Division, Institute of Nuclear Energy Research (INER))
Keh-Chyang Leou
(Department of Engineering and System Science, National Tsing Hua University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.PR2.4
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