Session RR1: Material Processing I

Chair: P. Kothnur, Novellus Systems, Inc
- Salon E


Thursday, October 16, 2008
1:30PM - 1:45PM

RR1.00001: Plasma Characterization of MPCVD Discharges for Nanocrystalline Diamond Deposition
Leigh Winfrey , Steven Shannon , Richard Chromik , Kathryn Wahl , Robert Nemanich , Mohamed Bourham

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Thursday, October 16, 2008
1:45PM - 2:00PM

RR1.00002: Nano-particle manipulation using pulse RF discharges with amplitude modulation
Shinya Iwashita , Hiroshi Miyata , Hidefumi Matsuzaki , Kazunori Koga , Masaharu Shiratani

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Thursday, October 16, 2008
2:00PM - 2:15PM

RR1.00003: GEC Student Award for Excellence Finalist: Plasma controlled adatom delivery and (re)distribution: enabling uninterrupted low temperature growth of ultra long vertically aligned carbon nanotubes
Eugene Tam , Kostya Ostrikov

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Thursday, October 16, 2008
2:15PM - 2:30PM

RR1.00004: Thermal treatment influence on magnetoresistive properties of the MgF$_2$ - Co and and MgF$_2$ - Permalloy films prepared by thermoelectron sustained vacuum discharge
C.P. Lungu , I. Mustata , A. Anghel , A.M. Lungu , O. Pompilian , C. Porosnicu , C. Ticos , V. Kuncser , G. Schinteie , D. Predoi

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Thursday, October 16, 2008
2:30PM - 2:45PM

RR1.00005: High Aspect Ratio HBr Based Dry Etching of GaInAsP/InP for Nanoscale Photonic Couplers
Nahid Sultana , Wei Zhou , Duncan MacFarlane

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Thursday, October 16, 2008
2:45PM - 3:00PM

RR1.00006: Control of deposition profile of plasma CVD hard carbon films on substrates with trenches
Masaharu Shiratani , Jun Umetsu , Kazuhiko Inoue , Takuya Nomura , Hidefumi Matsuzaki , Kazunori Koga , Yuichi Setsuhara , Makoto Sekine , Masaru Hori

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Thursday, October 16, 2008
3:00PM - 3:15PM

RR1.00007: Plasma assisted deposition of metal fluorides for 193nm applications
Martin Bischoff , Maik Sode , Dieter Gaebler , Norbert Kaiser , Andreas Tuennermann

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Session RR2: Lighting Plasmas

Chair: D. Leonhardt, Fusion UV Systems, Inc.
- Salon A-D


Thursday, October 16, 2008
1:30PM - 1:45PM

RR2.00001: Phase resolved investigation of the power balance of HID lamp electrodes from low to RF frequency operation
Jens Reinelt , Michael Westermeier , Juergen Mentel , Peter Awakowicz

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Thursday, October 16, 2008
1:45PM - 2:00PM

RR2.00002: Barium transport in fluorescent lamps
F. Sigeneger , K. Rackow , D. Uhrlandt , J. Ehlbeck , G. Lieder

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Thursday, October 16, 2008
2:00PM - 2:30PM

RR2.00003: Continuum Processes in High and Ultra High Pressure Lamps
Invited Speaker: J.E. Lawler

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Thursday, October 16, 2008
2:30PM - 2:45PM

RR2.00004: Generation of Transition Probability Data: Can quantity and quality be balanced?
J.J. Curry , C. Froese Fisher

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Thursday, October 16, 2008
2:45PM - 3:00PM

RR2.00005: Arguments for increased efficiency of Xe excimer DBDs by pulsed instead of sinusoidal excitation
Mark Paravia , Klaus E. Trampert , Michael Meisser , Wolfgang Heering

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