Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session RR1: Material Processing I
1:30 PM–3:15 PM,
Thursday, October 16, 2008
Room: Salon E
Chair: P. Kothnur, Novellus Systems, Inc
Abstract ID: BAPS.2008.GEC.RR1.1
Abstract: RR1.00001 : Plasma Characterization of MPCVD Discharges for Nanocrystalline Diamond Deposition
1:30 PM–1:45 PM
Preview Abstract Abstract
Authors:
Leigh Winfrey
(NC State University)
Steven Shannon
(NC State University)
Richard Chromik
(McGill University)
Kathryn Wahl
(Naval Research Laboratory)
Robert Nemanich
(Arizona State University)
Mohamed Bourham
(NC State University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.RR1.1
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