Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session PR1: Fluorocarbon Plasmas I
8:00 AM–9:30 AM,
Thursday, October 16, 2008
Room: Salon E
Chair: Truell Hyde, Baylor University
Abstract ID: BAPS.2008.GEC.PR1.4
Abstract: PR1.00004 : On the effect of additional CF$_2$ scattering data on a CF$_4$/O$_2$ plasma etch simulation
9:00 AM–9:15 AM
Preview Abstract Abstract
Authors:
James J. Munro
(University College London, Gower Street, WC1E 6BT, UK)
Natasha Doss
(University College London, Gower Street, WC1E 6BT, UK)
Jonathan Tennyson
(University College London, Gower Street, WC1E 6BT, UK)
Song-Yun Kang
(Tokyo Electron Limited, Technology Development Center, 650 Mitsuzawa, Hosaka-cho, Nirasaki-Shi, Yamanashi, Japan 407-0194)
Masato Kawakami
(Tokyo Electron Limited, Technology Development Center, 650 Mitsuzawa, Hosaka-cho, Nirasaki-Shi, Yamanashi, Japan 407-0194)
Sumie Segawa
(Tokyo Electron Limited, Technology Development Center, 650 Mitsuzawa, Hosaka-cho, Nirasaki-Shi, Yamanashi, Japan 407-0194)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.PR1.4
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