Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session PR1: Fluorocarbon Plasmas I
8:00 AM–9:30 AM,
Thursday, October 16, 2008
Room: Salon E
Chair: Truell Hyde, Baylor University
Abstract ID: BAPS.2008.GEC.PR1.3
Abstract: PR1.00003 : Critical roles of CF$_{4}$ and SiCl$_{4}$ plasma treatments on AlGaN/GaN transistor performance
8:45 AM–9:00 AM
Preview Abstract Abstract
Authors:
Anirban Basu
(University of Illinois)
Ilesanmi Adesida
(University of Illinois)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.PR1.3
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