Bulletin of the American Physical Society
61st Annual Gaseous Electronics Conference
Volume 53, Number 10
Monday–Friday, October 13–17, 2008; Dallas, Texas
Session PR1: Fluorocarbon Plasmas I
8:00 AM–9:30 AM,
Thursday, October 16, 2008
Room: Salon E
Chair: Truell Hyde, Baylor University
Abstract ID: BAPS.2008.GEC.PR1.5
Abstract: PR1.00005 : Li$^{+}$ attachment mass spectrometric investigation of high-mass neutral species in the downstream region of Ar/CF$_{4}$, Ar/CF$_{4}$/O$_{2}$ and Ar/CF$_{4}$/H$_{2}$ plasmas
9:15 AM–9:30 AM
Preview Abstract Abstract
Authors:
Kenji Furuya
(Kyushu University)
Hiroshi Okumura
Yuji Tamai
Akihiro Ide
Akira Harata
Collaboration:
Kyushu Univ.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2008.GEC.PR1.5
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