Micromachined YIG Resonators*

In this talk I will present micromachining technology for fabricating thin-film YIG resonators and filters on a chip. Specifically, I will discuss how we incorporated standard MEMS etching technology [1] and microwave back-end-of-line (BEOL) metallization techniques [2] to demonstrate high quality-factor (Q) octave-tunable YIG resonators [3]. I will showcase the capability of our YIG technology platform by demonstrating notch [4] and band-pass filters [5,6] for frequency-agile radio communication systems.

 

This work is a close collaboration between the OxideMEMS Lab at Purdue University and Dr. Renyuan (Ryan) Wang’s team at BAE Fast Labs.

[1] Renyuan Wang, Sunil A. Bhave and Kushal Bhattacharjee, "Design and fabrication of S0 Lamb wave thin-film Lithium Niobate micromechanical resonators," IEEE Journal of Microelectromechanical Systems 24(2) 300-308 (2015).

[2] Jeff Pulskamp, Daniel Judy, Roger Kaul, Ronald Polcawich, Hengky Chandrahalim and Sunil A. Bhave, "Monolithically integrated piezo-MEMS SP2T switch and contour-mode filters," 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, January 25-29, 2009, pp. 900-903.

[3] Sen Dai, Sunil A. Bhave and Renyuan Wang, "Octave tunable magnetostatic YIG resonators on a chip," IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 67(11) 2454-2460 (2020).

[4] Yiyang Feng, Sudhanshu Tiwari, Sunil A. Bhave, and Renyuan Wang, "Micro-machined Tunable Magnetostatic Forward Volume Wave Bandstop Filter," IEEE Microwave and Wireless Technology Letters 33(6), 807-810 (2023).

[5] Connor Dewitt, Renyuan Wang, Sudhanshu Tiwari, and Sunil A. Bhave, "An edge-coupled magnetostatic bandpass filter," arxiv:2312.10583.

[6] Connor Dewitt, Sudhanshu Tiwari, Sunil A. Bhave and Renyuan Wang, "A distributed magnetostatic resonator," arxiv:2401.08911.