Bulletin of the American Physical Society
APS March Meeting 2023
Volume 68, Number 3
Las Vegas, Nevada (March 5-10)
Virtual (March 20-22); Time Zone: Pacific Time
Session T00: Poster Session III (1pm-4pm PST)
1:00 PM,
Thursday, March 9, 2023
Room: Exhibit Hall (Forum Ballroom)
Sponsoring
Unit:
APS
Abstract: T00.00165 : Metasurface engineering of transition metal dichalcogenides by anisotropic etching*
Presenter:
Dorte R Danielsen
(Technical University of Denmark)
Authors:
Dorte R Danielsen
(Technical University of Denmark)
Anton Lyksborg-Andersen
(Technical University of Denmark)
Kirstine E Sandager Nielsen
(Technical University of Denmark)
Bjarke S Jessen
(Columbia University)
Timothy J Booth
(Technical University of Denmark)
Manh-ha Doan
(Technical University of Denmark)
Yingqiu Zhou
(Technical University of Denmark)
Avishek Sarbajna
(Technical University of Denmark)
Søren Raza
(Technical University of Denmark)
Lene Gammelgaard
(Technical University of Denmark)
Peter Bøggild
(Technical University of Denmark)
We combine electron beam lithography with anisotropic reactive ion etching to realize nanoscale hexagonal patterns in multilayer transition metal dichalcogenides (TMDs) [1]. Anisotropic etching, where the etch rate varies with in-plane crystal orientation, is achieved using a sulphur hexafluoride plasma with low power and high pressure. The etched patterns have ultrasharp corners, near atomic edge smoothness. Of the studied TMDs, WS2 exhibits the largest degree of etching anisotropy [1].
Anisotropic etching is a promising tool for making TMD-based metasurfaces [2,3], that take advantage of the high refractive indices and non-lossy nature of TMDs for dielectric light confinement. We will present our recent efforts in realizing optical resonances in TMDs structured by anisotropic etching. Such devices may find applications within sensing, integrated photonics, and optical communication technology.
[1] D. Danielsen et al., ACS Appl. Mater. Interfaces, 13, 41886-41894, (2021).
[2] P. Zotev, et al., ACS Nano 16, 6493-6505 (2022).
[3] B. Munkhbat, et al., Nat. Com. 11, 4604 (2020).
*Independent Research Fund DenmarkCenter for Nanostructured Graphene (DNRF103)
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700