Bulletin of the American Physical Society
APS March Meeting 2023
Volume 68, Number 3
Las Vegas, Nevada (March 5-10)
Virtual (March 20-22); Time Zone: Pacific Time
Session T00: Poster Session III (1pm-4pm PST)
1:00 PM,
Thursday, March 9, 2023
Room: Exhibit Hall (Forum Ballroom)
Sponsoring
Unit:
APS
Abstract: T00.00164 : Characterization of Pt quantum dots fabricated by electron-beam induced deposition*
Presenter:
Binod D.C.
(Texas State University)
Authors:
Binod D.C.
(Texas State University)
Noah Austin-Bingamon
(Texas State University)
Yoichi Miyahara
(Texas State University)
We study Pt quantum dots (QDs) deposited by focused electron-beam induced deposition on atomic layer deposition (ALD) grown Al2O3 on Pt-coated Si substrates, which finds potential applications in sensors, solar cells [1], and single-electron boxes. While the deposited dots are rich in carbon, the carbon content can be reduced by annealing the deposits in the oxygen environment [2]. The removal of the carbon from the dots is confirmed by the morphology studies and conductive atomic force microscopy (C-AFM) measurements before and after the annealing. The electron tunneling through the ALD grown Al2O3between the dots and the Pt layer is then studied using the single-electron sensitive electrostatic force microscopy (e-EFM) technique [3]. We will present the tunneling rate and charging energy of the Pt QDs in the single-electron box configuration.
[1] X. Lu, R. Wan, and T. Zhang, 23, 295 (2015).
[2] H. C. George et al., J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Mater. Process. Meas. Phenom. 29, 06FB01 (2011).
[3] Y. Miyahara, A. Roy-Gobeil, and P. Grutter, Nanotechnology 28, 1 (2017).
*We gratefully acknowledge funding from NSF DMR-2122041, NSF DMR-2044920, and NSF DMR-2117438.
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