Bulletin of the American Physical Society
APS March Meeting 2021
Volume 66, Number 1
Monday–Friday, March 15–19, 2021; Virtual; Time Zone: Central Daylight Time, USA
Session X29: Calibration and Gates in Spin Qubit Arrays
8:00 AM–10:48 AM,
Friday, March 19, 2021
Sponsoring
Unit:
DQI
Chair: Aaron Weinstein, HRL Laboratories, LLC
Abstract: X29.00005 : Qubits in quantum dot arrays made with all-optical, 300mm wafer lithography
9:12 AM–9:24 AM
Live
Presenter:
Anne-Marije Zwerver
(Delft University of Technology)
Authors:
Anne-Marije Zwerver
(Delft University of Technology)
Tobias Stefan Krähenmann
(Delft University of Technology)
Thomas Watson
(Components Research, Intel Corporation)
Lester Lampert
(Components Research, Intel Corporation)
Stephanie Bojarski
(Components Research, Intel Corporation)
Hubert C George
(Components Research, Intel Corporation)
Brennen Mueller
(Components Research, Intel Corporation)
Jim Clarke
(Components Research, Intel Corporation)
Lieven Vandersypen
(Delft University of Technology)
Here, we present the first, well-controlled qubits made in quantum dot arrays fabricated in a 300mm process line on an isotopically-enriched 28Si MOS substrate. These devices are fully fabricated with optical lithography and chemical-mechanical polishing techniques for patterning, compatible with state-of-the-art industrial fabrication. We demonstrate well-controlled single and double quantum dots with separate tunnel-barrier control in the multi-electron regime. The latter is a prerequisite to perform high-fidelity two-qubit gates. Moreover, we demonstrate charge sensing with a signal-to-noise ratio high enough for single shot readout. With this, we form high-quality qubits in the single-electron regime, comparable to qubits in academic devices.
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