Highly Uniform Submicron Junction Arrays for Quantum Information Processing*

Josephson junctions are an ubiquitous circuit element in cQED experiments. In complex devices with many such junctions, precise control over each junction’s critical current is often required, and thus variations of the junction area and tunnel barrier thickness must be sufficiently minimized. Analyzing junction array resistance distributions from many wafers, we have identified several key processing variables to improve uniformity. Nevertheless, the uniformity of as-fabricated junctions leaves much to be desired as quantum processors or single microwave photon detectors requiring 100’s or 1000’s of junctions begin to be realized. Therefore, we also present progress in implementing laser annealing techniques to fine tune junction resistances post-fabrication.