Remote Capacitive Sensing in Two-Dimensional Quantum-Dot Arrays*

We investigate gate-induced quantum dots in silicon nanowire fabricated using a foundry-compatible fully depleted silicon-on-insulator (FD-SOI) process. A series of split gates overlapping the silicon nanowire naturally produces a 2 × n bilinear array of quantum dots. We present the capacitive coupling of quantum dots within such a 2 × 2 array and then show how such couplings can be extended across two parallel silicon nanowires coupled together by shared, electrically isolated, “floating” electrodes. With one quantum dot operating as a single-electron-box sensor, the floating gate serves to enhance the charge sensitivity range, enabling it to detect charge state transitions in a separate silicon nanowire. By comparing measurements from multiple devices, we illustrate the impact of the floating gate by quantifying both the charge sensitivity decay as a function of dot-sensor separation and configuration within the dual-nanowire structure.