Integration of two-dimensional transition-metal dichalcogenide superconductors into 2D-3D hybrid superconducting resonators*

Atomically-thin two-dimensional (2D) transition-metal dichalcogenide superconductors enable uniform, flat and clean van der Waals tunneling interfaces, as well as increased kinetic inductance due to the atomically-thin geometry, and resilience to large in-plane magnetic fields, motivating their integration into conventional superconducting circuits. We created 2D-3D Josephson junction contacts with R=0 and critical currents between 0.15uA-128uA. We have embedded these 2D-3D contacts in RF tank circuits (Q > 4000) operating between 2.5-5 GHz to measure the kinetic inductance of the TMD superconductor NbSe₂, which is extracted by observing a shift in frequency from a fully conventional control sample. The 2D-3D hybrid resonators are subsequently measured using standard DC transport techniques to extract junction critical currents and subtract Josephson inductance from the RF results. Our work lays the foundation for the analysis of TMD nano-devices in superconducting circuits.