Multilayer Microwave Integrated Quantum Circuits: Part 3*

Superconducting quantum circuits provide a promising platform for quantum information processing. Resonant modes found in superconducting enclosures can be engineered to offer superior coherence and a better electromagnetic environment than their planar analogs. Here, we will discuss the Multilayer Microwave Integrated Quantum Circuit (MMIQC). A crucial component of the MMIQC is the realization of a high quality superconducting enclosure. In this talk, we will demonstrate on-chip microwave resonant cavities with low-power quality factors exceeding 300 million. In addition, we will describe their power and temperature dependence. Finally, we will discuss factors that may limit the performance of these cavities by placing bounds on intrinsic loss mechanisms.