Bulletin of the American Physical Society
APS March Meeting 2020
Volume 65, Number 1
Monday–Friday, March 2–6, 2020; Denver, Colorado
Session F16: Superconducting Qubit Materials, Fabrication, and Coherence I
8:00 AM–11:00 AM,
Tuesday, March 3, 2020
Room: 201
Sponsoring
Unit:
DQI
Chair: Corey Rae McRae, National Institute of Standards and Technology Boulder
Abstract: F16.00012 : Reliable Growth of TaN Superconducting Film with Atomic Layer Deposition for Quantum Circuit Applications*
Presenter:
Wonho Song
(Ulsan Natl Inst of Sci & Tech)
Authors:
Wonho Song
(Ulsan Natl Inst of Sci & Tech)
Sungchul Jung
(SK Hynix)
Junhyung Kim
(Ulsan Natl Inst of Sci & Tech)
Gahyun Choi
(Korea Research Institute of Standards and Science)
Joonyoung Lee
(Korea Research Institute of Standards and Science)
Yonuk Chong
(Korea Research Institute of Standards and Science)
Kibog Park
(Ulsan Natl Inst of Sci & Tech)
*NRF-2019R1F1A1057767, NRF-2019M3E4A1080198
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