Bulletin of the American Physical Society
APS March Meeting 2019
Volume 64, Number 2
Monday–Friday, March 4–8, 2019; Boston, Massachusetts
Session T70: Poster Session III(1:00pm-4:00pm)
1:00 PM,
Thursday, March 7, 2019
BCEC
Room: Exhibit Hall
Abstract: T70.00046 : Mask aligner for ultrahigh vacuum with capacitive distance control
Presenter:
Priyamvada Bhaskar
(RWTH Aachen University)
Authors:
Priyamvada Bhaskar
(RWTH Aachen University)
Simon Mathioudakis
(RWTH Aachen University)
Tim Olschewski
(RWTH Aachen University)
Florian Muckel
(RWTH Aachen University)
Jan Rafael Bindel
(RWTH Aachen University)
Marco Pratzer
(RWTH Aachen University)
Marcus Liebmann
(RWTH Aachen University)
Markus Morgenstern
(RWTH Aachen University)
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