Bulletin of the American Physical Society
APS March Meeting 2019
Volume 64, Number 2
Monday–Friday, March 4–8, 2019; Boston, Massachusetts
Session S33: Semiconductors and Applications II
11:15 AM–2:15 PM,
Thursday, March 7, 2019
BCEC
Room: 204B
Sponsoring
Unit:
FIAP
Chair: Thomas Vandervelde, Univ of Virginia
Abstract: S33.00014 : Epitaxial growth of large grain size polycrystalline silicon on SiO2 by reduced pressure chemical vapor deposition
1:51 PM–2:03 PM
Presenter:
Kaigui Zhu
(Beihang University)
Authors:
Kaigui Zhu
(Beihang University)
Fangfang Chen
(Beihang University)
Huicai Zhong
(Insititute of Microelectronics of Chinese Academy of Sciences)
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