An Ultra-High Vacuum Cryogen-free Low Temperature Proximal Probe System for the Exploration of Low Dimensional Materials and Nano-devices*

We introduce a new design concept that combines into one instrument, several scanning probe microscopy modules, ultra-high vacuum, low temperature, magnetic field, and cryogen free operation. The integration of these capabilities is made possible by the realization of an ultra-compact scanning probe microscopy (SPM) head with a modular design for accommodating interchangeable probes including STM, AFM, and MFM. A novel transfer mechanism makes it possible to transfer the SPM head between various chambers of a compact UHV system for loading probes, tips, and samples. The instrument is equipped with stages for sputtering, e-beam film deposition, and exfoliation for in-situ sample preparation and tip conditioning. Following the UHV room-temperature assembly, the entire SPM with the loaded sample is transferred without breaking vacuum to a variable temperature cryogen-free cryostat and magnet. The integration of all these capabilities into one instrument enables in-situ nano-scale characterization of low dimensional systems and devices in an ultra-clean environment, and under controlled temperature and field conditions.