Bulletin of the American Physical Society
APS March Meeting 2018
Volume 63, Number 1
Monday–Friday, March 5–9, 2018; Los Angeles, California
Session G60: Poster Session I
Tuesday, March 6, 2018
LACC Room: West Hall A
Abstract ID: BAPS.2018.MAR.G60.235
Abstract: G60.00235 : Design and fabrication of ultra-coherent nanomechanical oscillators using phononic crystals and strain engineering
Nils Johan Engelsen
Here, we will present design techniques to further increase the quality factors of Si3N4 nanobeams, and thereby allow up to hundred coherent oscillations at room temperature. Through fabrication of non-uniform phononic crystal patterns on nanobeams, we co-localize the strain and flexural motion of a Si3N4 nanobeam. Fabrication of levitated nanobeams with thicknesses ranging from 20nm to 100nm and lengths varying from 3mm to 8mm is demanding due to the extreme aspect ratios and requires a set of specialized techniques. The measurement of mechanical quality factors in the hundreds of millions at MHz frequencies must be performed in high vacuum, and are here performed using an optical interferometer. Using these techniques we have realized nanobeams with Qf products exceeding 10^14 Hz at frequencies ranging from 1 to 6 MHz.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.MAR.G60.235
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