Tunable Infrared Metasurfaces from Soft Polymer Scaffolds*

We have developed a microelectromechanical systems (MEMS) atomic calligraphy based method for the fabrication of optical metasurfaces on soft polymer scaffolds. The scaffolds are engineered to allow for tuning of the metasurface optical response when strain is applied. Our technique has demonstrated metasurfaces with frequency tunable mid-infrared resonances. Here, we explore how our fabrication method and mechanical tuning can be used to control other optical parameters, such as the polarization of transmitted or reflected light, to produce strain tunable polarizers and chiral metasurfaces. We also highlight efforts to integrate these metasurfaces as part of functional devices, like MEMS actuators, for dynamic control of optical parameters.