Micromachined Angle Resolved $^3$He Quasi-particle Detector*

Micromachined comb-drive mechanical resonators have been developed for the study of quantum fluids. Our study in $^3$He-B showed that the temperature dependence of the damping in this device was consistent with a damping model derived from thermal quasi-particles and demonstrated its potential as a sensitive quasi-particle flux detector. It is natural to conceive a scheme to build angle-resolved or space-momentum resolved $^3$He quasi-particle detectors in the form of array of resonators. This type of detectors could play an important role in revealing detailed structure of excitations or visualizing vortices in quantum fluids. A prototype detector is composed of $4 \times 4$ or $6 \times 6$ array of comb-drive resonators with strategically dispersed resonance frequencies. In this paper, We will discuss the working principle and design of the detector array.\\