Bulletin of the American Physical Society
APS March Meeting 2015
Volume 60, Number 1
Monday–Friday, March 2–6, 2015; San Antonio, Texas
Session D8: Complex Films & Surfaces: Oxides, Alloys, and Semiconductors
2:30 PM–5:18 PM,
Monday, March 2, 2015
Room: 006C
Sponsoring
Unit:
DCMP
Abstract ID: BAPS.2015.MAR.D8.14
Abstract: D8.00014 : Chemical Reactions and Atomic Removal Dynamics during Gallium Nitride Chemical Mechanical Polishing Process: Quantum Chemical Molecular Dynamics Simulations
5:06 PM–5:18 PM
Preview Abstract Abstract
Authors:
Kentaro Kawaguchi
(Fracture and Reliability Research Institute Graduate School of Engineering, Tohoku University)
Yuji Higuchi
(Fracture and Reliability Research Institute Graduate School of Engineering, Tohoku University)
Nobuki Ozawa
(Fracture and Reliability Research Institute Graduate School of Engineering, Tohoku University)
Momoji Kubo
(Fracture and Reliability Research Institute Graduate School of Engineering, Tohoku University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.MAR.D8.14
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