Lift-Off Processing and Aluminum on Silicon Superconducting Circuit Coherence*

Dielctric loss from two level states (TLS's) are a limiting decoherence method in planar superconducting qubits. Previously we have shown that liftoff deposited metal has more loss than etched devices. Current fabrication techniques of Xmon qubit devices limit this loss by using liftoff metal on only a small area of the transmon including the Josephson junctions. However this method leads to excess loss when used on a silicon substrate. I have used quality factor measurments of coplanar waveguide resonator circuits as a tool to measure isolated steps in the liftoff processes. I will report on the effects of these steps and their added loss.