Bulletin of the American Physical Society
2006 APS March Meeting
Monday–Friday, March 13–17, 2006; Baltimore, MD
Session V41: Focus Session: Dielectric, Ferroelectric, and Piezoelectric Oxides V
11:15 AM–2:15 PM,
Thursday, March 16, 2006
Baltimore Convention Center
Room: 344
Sponsoring
Unit:
DMP
Chair: Eric Cockayne, National Institute of Standards and Technology
Abstract ID: BAPS.2006.MAR.V41.10
Abstract: V41.00010 : Surface Micromachined Ferroelectric MEMS Devices: Correlating Device Performance with Film Microstructure*
1:27 PM–1:39 PM
Preview Abstract Abstract
Authors:
Jennifer Ruglovsky
Matthew Dicken
Kenneth Diest
Mohamed El-Naggar
Sharlotte Bolyard
David Goodwin
Guruswami Ravichandran
Kaushik Bhattacharya
Harry Atwater
(California Institute of Technology)
*Supported by ARO-MURI:DAAD 19-01-1-0517
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.MAR.V41.10
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