Bulletin of the American Physical Society
2006 APS March Meeting
Monday–Friday, March 13–17, 2006; Baltimore, MD
Session U7: Nanoscale Pattern Generation and Lithography
8:00 AM–11:00 AM,
Thursday, March 16, 2006
Baltimore Convention Center
Room: 307
Sponsoring
Unit:
FIAP
Chair: Ya-Hong Xie, University of California, Los Angeles
Abstract ID: BAPS.2006.MAR.U7.4
Abstract: U7.00004 : Atomic Image Projection Electron Beam Lithography*
9:48 AM–10:24 AM
Preview Abstract Abstract
Author:
Ki-Bum Kim
(Seoul National University)
*This work was supported by the Tera-Level Nano Devices, one of the Frontier programs supported by the Ministry of Science and Technology of Korea.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2006.MAR.U7.4
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