77th Annual Gaseous Electronics Conference
Monday–Friday, September 30–October 4 2024;
San Diego, California
Session Index
Session DR5: Plasma Diagnostics V
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Chair: Christophe Laux, CentraleSupelec, University Paris Saclay
Room: Shutters East I and II
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Thursday, October 3, 2024
4:00PM - 4:30PM
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DR5.00001: Measurements of plasma parameters in a semiconductor processing reactor
Invited Speaker:
Andrei Khomenko
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Thursday, October 3, 2024
4:30PM - 4:45PM
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DR5.00002: Experimental study of intermediate-Pressure RF-CCP in Ar-O2 mixtures
Shu Zhang, Garrett Curley, Jean-Paul Booth
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Thursday, October 3, 2024
4:45PM - 5:00PM
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DR5.00003: Quantitative measurements of atomic oxygen using hybrid fs/ps CARS
Timothy Chen, Christopher J Kliewer
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Thursday, October 3, 2024
5:00PM - 5:15PM
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DR5.00004: Spectroscopy of rubidium Rydberg states in inert buffer gases
Bineet K Dash, Eric G Paradis, Nithiwadee Thaicharoen, Alisher Duspayev, Georg A Raithel
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Thursday, October 3, 2024
5:15PM - 5:30PM
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DR5.00005: A two-color heterodyne interferometer for high-speed measurement of electron density in partially ionized gases and plasma
Rishav Choudhary, Bilal Hassan, Kaeshav Chandrasekar, Tyler Linfesty, Christopher M Limbach, Yue Wu, Jacob George
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