Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session HT4: Poster Session I (4:00-6:00pm, JST)
4:00 PM,
Tuesday, October 4, 2022
Sendai International Center
Room: Sakura 1
Abstract: HT4.00072 : Plasma discharge characteristics for balanced magnetron sputtering cathode
Presenter:
Taisei Motomura
(AIST)
Authors:
Taisei Motomura
(AIST)
Tatsuo Tabaru
(AIST)
[1] T. Motomura and T. Tabaru, AIP Adv. 7, 125225 (2017).
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