Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session HT4: Poster Session I (4:00-6:00pm, JST)
4:00 PM,
Tuesday, October 4, 2022
Sendai International Center
Room: Sakura 1
Abstract: HT4.00070 : Time-dependent Measurement of Ion Composition in Pulse-operated Ar/C4F8/O2 Dual-frequency Capacitively-Coupled Plasma
Presenter:
Yuto Seki
(Nagoya University)
Authors:
Yuto Seki
(Nagoya University)
Haruhito Kato
(Nagoya University)
Kuboi Shuichi
(Nagoya University)
Haruka Suzuki
(Nagoya University, Center for Low-temperature Plasma Sciences)
Hirotaka Toyoda
(Nagoya University, Center for Low-temperature Plasma Sciences, National Institute of Fusion Science)
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