On plasma parameters with changing chamber size*

In general, the chamber size in an inductively coupled plasma is very important because it affects the electron heating mechanism and the effective area of particle loss. In this work, we investigate the change in plasma parameters by changing the radius and length in a cylindrical chamber. The electron energy distribution functions, plasma density, electron temperature, etc are experimentally measured and compared with the calculation results. Both results showed good agreement with each other. The work is discussed along with the relevant physical mechanism.