Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GT1: Electron and Photon Collisions - Excitation
8:00 AM–9:30 AM,
Tuesday, October 4, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Harindranath Ambalampitiya, Quantemol Ltd
Abstract: GT1.00001 : Quantitative measurements of electron collision cross sections and their database related to plasma modeling*
8:00 AM–8:30 AM
Presenter:
Masamitsu Hoshino
(Sophia University)
Authors:
Masamitsu Hoshino
(Sophia University)
Ayuta Suzuki
(Tokyo Electron Technology Solutions Limited)
Masaaki Matsukuma
(Tokyo Electron Technology Solutions Limited)
Collaborations:
Sophia University, Tokyo Electron Technology Solutions Limited
The cross-section measurements were performed using a crossed-beam apparatus in the incident electron energies of 4.0 - 15 eV and over scattering angle range of 10o - 130o. Angular distributions of elastically and inelastically scattered electrons were normalized to the well-known absolute elastic DCS of helium by the relative flow technique. Elastic and inelastic ICSs were also obtained by extrapolating the DCSs measured over the angular range from 0o to 180o.
The ICSs for vibrational excitations to the fundamental modes and their combinations were extracted in addition to the elastic DCSs reported in the literature. The cross-section dataset of CH2F2 molecules has been updated by adding the present vibrational ICSs for each vibrational mode.
*This work was partly supported by the Grant-in-Aid for Scientific Research (C) (KAKENHI) Grant Number JP19K03812.
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