Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GR5: Diamond Like Carbon Deposition
4:00 PM–6:00 PM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Kunihiro Kamataki, Kyushu University
Abstract: GR5.00008 : Deposition mechanism of hydrogenated amorphous carbon film by C3H6/H2 mixture gas plasma
5:45 PM–6:00 PM
Presenter:
Hiroki Kondo
(Nagoya Univ)
Authors:
Hiroki Kondo
(Nagoya Univ)
Jumpei Kurokawa
(Nagoya University)
Takayoshi Tsutsumi
(Nagoya University)
Makoto Sekine
(Nagoya University)
Kenji Ishikawa
(Nagoya University)
Masaru Hori
(Nagoya University)
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