Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GR5: Diamond Like Carbon Deposition
4:00 PM–6:00 PM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Kunihiro Kamataki, Kyushu University
Abstract: GR5.00006 : Evaluation of carbon bonding of DLC films using HF-HiPIMS method by Raman spectroscopy
5:15 PM–5:30 PM
Presenter:
Hiroyuki Fukue
(Okayama University of Science)
Authors:
Hiroyuki Fukue
(Okayama University of Science)
Tatsuyuki Nakatani
(Okayama University of Science)
Tadayuki Okano
(Tokyo Electronics Co., Ltd.)
Masahide Kuroiwa
(Tokyo Electronics Co., Ltd.)
Shinsuke Kunitsugu
(Industrial Technology Center of Okayama Prefecture)
Hiroki Oota
(Kenix Corporation)
Ken Yonezawa
(Kenix Corporation)
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