Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GR5: Diamond Like Carbon Deposition
4:00 PM–6:00 PM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Kunihiro Kamataki, Kyushu University
Abstract: GR5.00003 : Effect of xenon gas on deposition of diamond-like carbon film using high power pulsed magnetron sputtering*
4:30 PM–4:45 PM
Presenter:
Keita Takeda
(Department of Electrical and Electronic Engineering, Meijo University, Japan)
Authors:
Keita Takeda
(Department of Electrical and Electronic Engineering, Meijo University, Japan)
Akinori Oda
(Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Japan)
Hiroyuki Kousaka
(Department of Mechanical Engineering, Gifu University, Japan)
Ohta Takayuki
(Department of Electrical and Electronic Engineering, Meijo University, Japan)
The peak current applying to the carbon target was 70A, the pulse width was 10µs, and the frequency was 400 Hz. The total gas flow rate of Xe/Ar mixture gas was 10sccm at a pressure of 0.5 Pa. Xe gas mixture ratio to Ar gas was varied from 0% to 100%.
ID/IG ratio, which is due to disorder and graphite band, was evaluated by Raman scattering spectroscopy. ID/IG ratio was constant of 1.2 for any Xe gas mixture ratio. The flux and energy of carbon ions decreased with increasing Xe gas mixture ratio. Xe ion with high kinetic energy would contribute to the film density of the DLC because mass of Xe is three times larger than that of Ar.
*This work was partly supported by JSPS KAKENHI Grant No. 22K03590.
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