Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GR4: Modeling - New Algorithms and Machine Learning
1:30 PM–3:30 PM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Satoshi Hamaguchi, Osaka University; Jan Trieschmann, Kiel University
Abstract: GR4.00004 : Plasma Chamber Design Method Combined with Plasma Deep Learning Model and Optimization Algorithm*
2:15 PM–2:30 PM
Presenter:
JungMin Ko
(Mechatronics Research, Samsung Electronics Co.)
Authors:
JungMin Ko
(Mechatronics Research, Samsung Electronics Co.)
Jinkyu Bae
(Mechatronics Research, Samsung Electronics Co.)
Byungjo Kim
(Mechatronics Research, Samsung Electronics Co.)
Hyunjae Lee
(Mechatronics Research, Samsung Electronics Co.)
Younghyun Jo
(Mechatronics Research, Samsung Electronics Co.)
Sangki Nam
(Mechatronics Research, Samsung Electronics Co.)
*This work was supported by Mechatronics Research, Samsung Electronics Co., Ltd.'
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