Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FT3: Modeling - High Pressure and Streamers
1:30 PM–3:30 PM,
Tuesday, October 4, 2022
Sendai International Center
Room: Shirakashi 1
Chair: Loius Reboul, CMAP, Ecole Polytechnique
Abstract: FT3.00004 : Design of a Microwave Plasma Enhanced Chemical Vapor Deposition System Using the Fluid Modeling based on the Finite Element Method*
2:30 PM–2:45 PM
Presenter:
Kaviya Aranganadin
(Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University)
Authors:
Kaviya Aranganadin
(Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University)
Yilang Jiang
(Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University)
Jing-Shyang Yen
(Department of Electronic Engineering, National Taipei University of Technology)
Jwo-Shiun Sun
(Department of Electronic Engineering, National Taipei University of Technology)
Hua-Yi Hsu
(Department of Mechanical Engineering, National Taipei University of Technology)
Ming-Chieh Lin
(Multidisciplinary Computational Laboratory, Department of Electrical and Biomedical Engineering, Hanyang University)
*This work was partially supported by the BK21 FOUR (Fostering Outstanding Universities for Research) program through the National Research Foundation (NRF) funded by the Ministry of Education of Korea, the X-mind Crops program of NRF, ICT (NRF-2017H1D8A1032167), Hanyang University (HY-201400000002393) in Korea, and Mastek Technologies, Inc. in Taiwan.
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