Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FR1: Magnetron Plasmas
8:00 AM–9:30 AM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 1
Chair: Yevgeny Raitses, PPPL
Abstract: FR1.00001 : Electron power absorption in magnetron sputtering discharges
8:00 AM–8:30 AM
Presenter:
Bocong Zheng
(Fraunhofer USA)
Authors:
Bocong Zheng
(Fraunhofer USA)
Yangyang Fu
(Tsinghua University)
Keliang Wang
(Fraunhofer USA)
Thomas Schuelke
(Fraunhofer USA)
Qi Hua Fan
(Michigan State University)
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