Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FF4: Basic Plasma Phenomena |
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Chair: Atsushi Komuro, The University of Tokyo Room: Sendai International Center Shirakashi 1 |
Friday, October 7, 2022 4:00PM - 4:15PM |
FF4.00001: Transient phenomena during dense argon micro-plasma formation Dmitry Levko, Vivek Subramaniam, Laxminarayan L Raja We report on transient generation of highly ionized (ionization degree ∼10%) argon microplasma using a self-consistent fluid plasma model coupled with the compressible Navier–Stokes equations. The plasma is generated within a micrometer size cathode spot immediately after the onset of intense secondary electron emission from the cathode and exists over a relatively short duration of ∼10 ns. We observe the electron pressure within this microplasma exceeding the background gas pressure by a few times and discuss the mechanisms of the energy transfer from this plasma to the heavy species. The localized gas heating generates a compression wave that propagates from the cathode to the anode. |
Friday, October 7, 2022 4:15PM - 4:30PM |
FF4.00002: Study on Light Emission of Arcing Before Arcing Explosion in a Low-Temperature Plasma SiJun Kim, Chul-hee Cho, Min-su Choi, Young-seok Lee, In-ho Seong, Won-nyoung Jeong, Ye-bin You, Byeong-yeop Choi, Jang-jae Lee, Shin-jae You Although arcing is a ubiquitous phenomenon and one of the most critical issues in low-temperature plasma engineering, its mechanism has not been fully understood yet. To elucidate its mechanism, we investigated light emission of arcing in the initiation phase with an ultra-fast high-speed camera. As arcing occurs randomly in space, we employed an arcing inducing probe (AIP) designed to localized arcing on its probe tip edge. In this presentation, we report the observation of light emissions that occur before arcing current initiation (arcing explosion) and the validation of measurement results. Furthermore, we explore the evolution behavior of arcing in the initiation phase with a multiple-snapshot method. This research will contribute to understanding arcing evolution and underlying physics |
Friday, October 7, 2022 4:30PM - 4:45PM |
FF4.00003: One-dimensional Particle-based Kinetic Simulations of DC and RF gas breakdown Yusuke Yamashita, Kentaro Hara, Saravanapriyan Sriraman Anomalous breakdown is detrimental to the quality of plasma processing for semiconductor manufacture. In this study, to understand the physical processes of the gas breakdown, we conducted one-dimensional particle-in-cell simulations with a Monte Carlo collision algorithm (PIC-MCC) considering ion-induced secondary electron emission and field emission. We further implemented a numerical algorithm to automatically obtain the breakdown voltage. First, the simulation is verified against the DC Paschen theory, which indicates that the energy loss treatment is important to capture the Paschen curve. Second, we verified the simulation results against the Paschen curve considering the field emission that is particularly important for micro-discharges. The simulation results are in good agreement with the analytical solution. Last, the simulation is applied to study RF breakdown. We will discuss the RF breakdown in which multi-valued breakdown voltages are observed for a given pressure. |
Friday, October 7, 2022 4:45PM - 5:00PM |
FF4.00004: Numerical modeling of NS discharge development in inhomogeneous magnetic field Andrey Starikovskiy, Nickolay Aleksandrov, Mikhail N Shneider Numerical characterization of nanosecond pulsed discharges has been conducted in a strong magnetic field environment. Streamer discharge development and plasma generation in pure CO2 was analyzed when magnetic field was directed along the axis of the discharge cell. Numerical simulations were based of a two-dimensional fluid model. It is shown that strong magnetic field affect dramatically on the plasma formation. The NS streamer diameter decreases significantly, plasma density increases. Calculations were carried out for different magnetic field values for fixed CO2 pressure P = 50 Torr and fixed NS pulse voltage U = 20 kV. An increase in the magnetic field in the gap leads to a sharp deceleration of the radial ionization wave, a decrease in the streamer radius, and an increase in the local electric field on the streamer head. As a result, the development of the discharge is sharply accelerated, and the electron density in the streamer channel sharply increases. A very large longitudinal electric field is formed near the head of the streamer wich could produce ru-away electrons and x-ray flush. It can be concluded that the streamer discharge sharply changes its characteristics in inhomogeneous magnetic fields and this control mechanism could be used in numerous applications. |
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