Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FF1: Inductively Coupled Plasmas
8:00 AM–9:00 AM,
Friday, October 7, 2022
Sendai International Center
Room: Shirakashi 1
Chair: Mate Vass, Ruhr University Bochum, Germany
Abstract: FF1.00003 : Hardware design and process optimization of industrial ICP N2 reactor using Two and Three Dimensional CFD models
8:30 AM–8:45 AM
Presenter:
Abhra Roy
(ESI Group)
Authors:
Meihua Zhang
(Eugenus Inc.)
Abhra Roy
(ESI Group)
Ryong Hwang
(Eugene Technology)
Jeonghee Jo
(Eugene Technology)
Amir Kiaee
(Eugenus Inc)
David Solomon
(Eugenus Inc)
Yun Yang
(Eugenus Inc)
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