Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session EW5: Plasma Surface Interaction II
2:30 PM–4:00 PM,
Wednesday, October 5, 2022
Sendai International Center
Room: Hagi
Chair: Summit Agarwal, Colorado School of Mines
Abstract: EW5.00004 : Deep learning model for ion sputtering dynamics with molecular dynamics simulation*
3:30 PM–3:45 PM
Presenter:
Jinkyu Bae
(Mechatronics Research, Samsung Electronics Co.)
Authors:
Byungjo Kim
(Mechatronics Research, Samsung Electronics Co.)
Jinkyu Bae
(Mechatronics Research, Samsung Electronics Co.)
Hyunhak Jeong
(Mechatronics Research, Samsung Electronics Co.)
Suyoung Yoo
(Mechatronics Research, Samsung Electronics Co.)
Sang Ki Nam
(Mechatronics Research, Samsung Electronics Co.)
*This work was supported by Mechatronics Research, Samsung Electronics Co., Ltd.
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