Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session EW5: Plasma Surface Interaction II
2:30 PM–4:00 PM,
Wednesday, October 5, 2022
Sendai International Center
Room: Hagi
Chair: Summit Agarwal, Colorado School of Mines
Abstract: EW5.00001 : A global plasma and surface model of a hydrogen/methane inductively coupled discharges for the purpose of minimal optical transmission loss in Extreme-Ultra-Violet lithography machines
2:30 PM–2:45 PM
Presenter:
Efe Kemaneci
(ASML)
Authors:
Efe Kemaneci
(ASML)
Achim von Keudell
(Experimentalphysik, insbesondere Physik reaktiver Plasmen, Ruhr Uni Bochum)
Andrei Yakunin
(ASML)
Andrey Nikipelov
(ASML)
Mark van de Kerkhof
(ASML)
Vadim Banine
(ASML)
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