Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DM2: Workshop I: Industrial Plasma Technologies
10:30 AM–5:00 PM,
Monday, October 3, 2022
Sendai International Center
Room: Tachibana
Chair: Hajime Sakakita, National Institute of Adv Industrial Science and Technology; Taisei Motomura, National Institute of Advanced Industrial Science and Technology
Abstract: DM2.00007 : Quantitative Control of Plasma and Surface Reactions for Dielectric Film Etching
3:30 PM–4:15 PM
Presenter:
Tetsuya Tatsumi
(Sony Semiconductor Solutions Corporation)
Author:
Tetsuya Tatsumi
(Sony Semiconductor Solutions Corporation)
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